Investigation on the temperature coefficient of frequency performance of LiNbO₃ on quartz and glass surface acoustic wave resonators

Abstract High impedance ratio ( Z -ratio), low temperature coefficient of frequency (TCF) and spurious free characteristic are three main requirements for surface acoustic wave (SAW) resonators. The reported LiTaO 3 /Quartz (Qz) hetero layer (HAL) resonator can satisfy them, but the bandwidth is too narrow. LiNbO (LN) suitable wideband resonators, TCF large due to its high coupling factor. In this work, we study HAL SAW resonators combining LN kinds substrates with positive small thermal expansion, including Qz, ABC-G ZERO glasses. By simulation, Euler angles (0°, 101°, 0°) LN, 160°, 90°) 0.1–0.2 λ wavelength) thickness used. Results show LN/Qz, LN/ABC-G LN/ZERO exhibit -ratio 82.7 dB, 76.2 dB respectively. shows lowest −61 ppm C −1 at resonance −62 anti-resonance frequency.